Sputtering : A physical vapor deposition process where high-energy ions are used to bombard elemental sources of semiconductor material, which eject vapors of atoms that are then deposited in thin layers on a substrate
US Department of Labor, Electric Power eTool: Glossary of Terms, Occupational Safety & Health Administration OSHA, Washington, D.C., USA 2010. https://www.osha.gov/SLTC/etools/electric_power/gl ossary.html, (OSHA/ Electr Pwr - Amer) {618}