Manasevit : A process for making electronic devices by depositing thin films of elements or simple compounds such as gallium arsenide on flat substrates by CVD from volatile compounds such as trimethyl gallium and arsine
Comyns, Alan E. Dictionary, Encyclopedic Dictionary of Named Processes in Chemical Technology (3rd ed.), Alan E. Comyns (Ed.), Boca Raton, FL, CRC Press LLC, USA 2000, http://worldtracker.org/media/library/Science/Chem istry/Synthesis/Encyclopedic%20Dictionary%20of%20N amed%20Processes%20in%20Chemical%20Technology.pdf, (Named Chem Procss - Amer) {35}